Abstract: Integrate circuit simulation is an important assistant method，etching is a fatal process in the integrate circuit manufacture.The paper utilizes triangles to model the etching process，and deduces the formulas linking different planes（both plane and curve planes）.At last，the etching simulation result is depicted，which proves that the etching result is clear，the imaging speed is fast，and the resource occupancy is small，making the method practical for etching depicting.