Abstract: With the development of micro nano technology, a lot of precise microminiature electromechanical products have been widely used. Objecting to technique requirement of detection of micro nano component in the precise microminiature electromechanical products, a micro vision measurement system of high resolution CCD camera combined with universal stereo microscope is developed. It uses MATLAB software to study and deal with the collected images of micro nano component such as image preprocessing, threshold segmentation and mathematical morphology, edge detection and extraction, analysis and research. And it measures the tooth root diameter of the small gear, the measurement results are analyzed. The results show that the measurement error of the measurement system is small and the measuring accuracy of the measurement system is high, and it meets the requirements of precision measurement of micro nano structure.

Key words: micro machine vision, MATLAB, micro nano component, image processing and analysis, precision detection

摘要： 随着微纳米技术的发展，大量精密微小型机电产品得到了广泛的应用。针对微机电产品中微纳米构件精密检测的技术需求，提出了一种万向体式显微镜与高分辨率CCD相机相结合的显微机器视觉测量系统。采用MATLAB软件对采集到的图像进行了图像预处理、阈值分割及数学形态学处理、边缘检测及提取等的分析与研究。并且测量了微小齿轮的齿根圆直径，对测量结果进行了分析。结果表明该测量系统的测量误差较小，测量精度高，满足对微纳米级构件的精密测量的要求。

关键词: 显微机器视觉, MATLAB, 微纳米级构件, 图像处理与分析, 精密检测