Abstract: Curing oven is an important equipment for the manufacturing process of microelectronics. The internal temperature distribution of it has the characteristics of time delay, strong coupling and nonlinearity. Since the temperature model of the curing oven is very complex and there is thermal effect coupling between heaters, a FOPTD（First Order Plus Time Delay） plant, whose parameters are identified by the LSM（Least Square Method） and step response method, is used to describe the temperature near the working point. A decoupling control system based on the disturbance observer is also designed to realize the decoupling control between different heaters. Both simulation and experimental result show that the decoupling control method can restrain coupling between the heaters with smaller overshoot and steady-state error, indicating that the method has a good application value of similar systems in process control.

Key words: curing oven, Least Square Method（LSM）, disturbance observer, decoupling control

摘要： 固化炉是微电子制造过程的重要设备，它内部的温度分布具有大时滞、强耦合、非线性的特点。针对固化炉温度模型复杂和加热板热效应耦合的问题，将最小二乘法及阶跃响应法相结合，在工作点附近对固化炉温度建立一阶惯性延时模型，基于扰动观测器（disturbance observer）对芯片固化炉设计了解耦控制系统，实现了不同加热板之间的解耦控制。仿真和实验结果表明，该解耦控制方法能够抑制加热板之间的耦合影响，超调和稳态误差都较小，在过程控制中的同类系统中有较好的推广应用价值。

关键词: 固化炉, 最小二乘法, 扰动观测器, 解耦控制