Abstract: To resolve the scheduling problem of semiconductor wafer fabrication，which was characterized by reentrant，an ant colony algorithm-based semiconductor wafer fabrication scheduling model was put forward.In this model，optimization procedure of producing scheduling scheme was converted into search of directed graph using graph theory.Moreover，the expert system was introduced as inference engine to avoid the complexity judgment of feasible node in the optimization procedure.Finally，a simulation platform was build to prove the model’s feasibility and validity.

Key words: ant colony clustering algorithm, semiconductor wafer fabrication, reentrant, production scheduling, graph theory, expert system

摘要： 为了解决具有可重入特性的半导体生产线调度问题，提出基于蚁群算法的半导体生产线调度模型（ASWFSM）。在模型中，利用图论的方法把调度方案的寻优过程转换为蚂蚁对有向图的搜索，并且，引入专家系统作为推理机避免了寻优过程中对可行节点判断的复杂性。仿真试验证明，此模型具有良好的调度效果和稳定性。

关键词: 蚁群算法, 半导体生产线, 可重入, 生产调度, 图论, 专家系统