Abstract: To make the TRACK system of photolithography equipment run normally, avoid deadlock efficiently and improve utilization of the equipment, a deadlock-free scheduling algorithm is proposed. The algorithm can select effectively process module for the part to be moved for the next operation, deadlock recovery algorithm is used if deadlock has occurred, unexpected failures of process module is also taken into consideration. Simulation results demonstrate the effectiveness of the algorithm.

Key words: semiconductor manufacturing line, flexible routing, deadlock-free scheduling

摘要： 为使半导体生产线光刻设备的TRACK系统正常运行，有效的避免死锁，提高设备利用率，提出一种无死锁调度算法，在不会引发死锁的条件下为需要调度的工件确定加工组件，同时考虑到组件发生故障的情况，及时排除故障的影响，并通过仿真证明了算法的有效性。

关键词: 柔性路由, 无死锁调度, 半导体生产线