Abstract: For ensuring the teaching quality about the experiment of the large domestic first-class equipment and saving the spent on the experiment in the college，this paper explores the Reflection High Energy Electron Diffraction（RHEED） principle，atomic structure of the sample GaAs（001）_β2（2×4） surface and the knowledge of solid state physics，uses the graphical programming language，adopts the data stream programming style，designs and implements the RHEED patterns about atomic structure of the GaAs（001）_β2（2×4） surface in theory.The staged production breaks through the study headway of virtual RHEED experiment system.

Key words: virtual instrument, Laboratory Virtual Instrument Engineering Workbench（LabVIEW）, Gallium Arsenide（GaAs）, Reflection High Energy Electron Diffraction（RHEED） patterns

摘要： 为了保证有关国内一流大型仪器设备的实验教学质量，同时还能节省高校的实验耗费，在LabVIEW 8.2开发环境下，通过对反射式高能电子衍射仪（RHEED）原理、样品砷化镓GaAs（001）_β2（2×4）表面原子结构及相关固体物理学知识的深入探究，运用图形化编程语言，采用数据流编程方式，设计实现了理论情况下的GaAs（001）_β2（2×4）表面原子结构RHEED图谱。该阶段性成果使得虚拟RHEED实验系统的研究开发有了突破性进展。

关键词: 虚拟仪器, 虚拟仪器开发平台（LabVIEW）, 砷化镓（GaAs）, 反射式高能电子衍射仪（RHEED）图谱