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中文
Design and implementation of measurement system for out-of-plane micro-motions of MEMS structures
XIE Yong-jun
1，2，3
，SHI Tie-lin
2，3
，LIU Shi-yuan
2，3
Computer Engineering and Applications . 2010, (
7
): 66 -68 . DOI: 10.3778/j.issn.1002-8331.2010.07.020
