Dissection of key technologies of electrostatically suspended accelerometer

doi:10.3778/j.issn.1002-8331.2009.34.021

Computer Engineering and Applications ›› 2009, Vol. 45 ›› Issue (34): 67-70.DOI: 10.3778/j.issn.1002-8331.2009.34.021

• 研发、设计、测试 • Previous Articles Next Articles

Dissection of key technologies of electrostatically suspended accelerometer

SONG Ren-wang¹，CHEN Lin-ying²

1.School of Electronics and Information Engineering，Taiyuan University of Science and Technology，Taiyuan 030024，China
2.School of Applied Science，Taiyuan University of Science and Technology，Taiyuan 030024，China

Received:2009-09-24 Revised:2009-11-03 Online:2009-12-01 Published:2009-12-01
Contact: SONG Ren-wang

静电悬浮加速度计关键技术剖析

宋仁旺¹，陈琳英²

1.太原科技大学电子信息工程学院，太原 030024
2.太原科技大学应用科学学院，太原 030024

通讯作者: 宋仁旺

Abstract

Abstract: In this paper，key technologies of electrostatically suspended accelerometer is analyzed，the parameter of structure and relation of output voltage to displacement of proof-mass is unfolded，the action of PID controller and damping action of residual gas is analyzed，the detecting formula of linear and angular acceleration is educed，and it is indicated，that the contribution of radiometer effect to the noise of acceleration is quite serious.

Key words: inertial sensor, accelerometer, electrostatically suspended, PID controller

摘要： 对静电悬浮加速度计的关键技术进行了分析，给出了结构参数、电容检测器的输出电压与位移的关系，分析了PID控制器的作用和残余气体的阻尼作用，导出了线加速度和角加速度的检测公式，指出了辐射计效应对加速度噪声有重要影响。

关键词: 惯性传感器, 加速度计, 静电悬浮, PID控制器

CLC Number:

TP212.9

SONG Ren-wang¹，CHEN Lin-ying². Dissection of key technologies of electrostatically suspended accelerometer[J]. Computer Engineering and Applications, 2009, 45(34): 67-70.

宋仁旺¹，陈琳英². 静电悬浮加速度计关键技术剖析[J]. 计算机工程与应用, 2009, 45(34): 67-70.

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Dissection of key technologies of electrostatically suspended accelerometer

静电悬浮加速度计关键技术剖析

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