关键词: 无模型自适应, 模糊控制, 参数自整定, 硅棒温度

Abstract: Temperature control of the silicon rod surface in the reduction furnace of polycrystalline silicon requires that the surface temperature of the silicon rod has to be maintained at the optimal reaction temperature and the fluctuation should not be violent. Due to the change of the electrical structure of the silicon rod as a result of the vapor deposition reaction in the production of polycrystalline silicon, there exists the characters of interconnection and nonlinear. This paper adopts the double closed-loop control system with model-free adaptive fuzzy controller as the major controller and PI as the auxiliary controller. It uses the structure of model-free adaptive controller and carries out on-line revision of its parameters by means of fuzzy rules, which not only ensures the convergence and stability of the temperature control system, but also enhances the rapid dynamic performance of the system toward temperature control. The simulations show the availability of this control method.

Key words: model-free adaptive, fuzzy control system, parameter self-tuning, silicon rod temperature