关键词: 固化炉, 最小二乘法, 扰动观测器, 解耦控制

Abstract: Curing oven is an important equipment for the manufacturing process of microelectronics. The internal temperature distribution of it has the characteristics of time delay, strong coupling and nonlinearity. Since the temperature model of the curing oven is very complex and there is thermal effect coupling between heaters, a FOPTD（First Order Plus Time Delay） plant, whose parameters are identified by the LSM（Least Square Method） and step response method, is used to describe the temperature near the working point. A decoupling control system based on the disturbance observer is also designed to realize the decoupling control between different heaters. Both simulation and experimental result show that the decoupling control method can restrain coupling between the heaters with smaller overshoot and steady-state error, indicating that the method has a good application value of similar systems in process control.

Key words: curing oven, Least Square Method（LSM）, disturbance observer, decoupling control