关键词: 蜂巢形基底, 纳米颗粒, SEM图像分析方法

Abstract: The SEM image features of nanoparticles on honeycomb substrate are analyzed and the problems during extraction of characteristic values of the nanoparticles are clarified. The big hole of nanoparticle image and interference of getting particle size by touched particles after image binarization treatment are solved by using image analysis methodology such as the morphological filtering, histogram equalization, and particle analysis. The SEM image processing algorithm of nanoparticles on honeycomb substrate is stated, and the targets of characteristic values extraction of nanoparticle such as duty radio and particle size distribution are archived. All these efforts lay the foundation of further quantitative evaluation and improvement of nanodevice parameters.

Key words: honeycomb substrate, nanoparticle, analysis method for SEM image