基于采样定理的白光干涉SEST算法研究

计算机工程与应用 ›› 2008, Vol. 44 ›› Issue (1): 79-81.

基于采样定理的白光干涉SEST算法研究

冯奎景^1,2,廖广兰^1,2,史铁林^1,2,王海珊^1,2

1.华中科技大学机械科学与工程学院，武汉 430074
2.武汉光电国家实验室，武汉 430074

收稿日期:1900-01-01 修回日期:1900-01-01 出版日期:2008-01-01 发布日期:2008-01-01
通讯作者: 冯奎景

White-light interferometric SEST algorithm based on sampling theory

FENG Kui-jing^1,2,LIAO Guang-lan^1,2,SHI Tie-lin^1,2,WANG Hai-shan^1,2

1.School of Mechanical Science and Engineering，Huazhong University of Science and Technology，Wuhan 430074，China
2.Wuhan National Laboratory for Optoelectronics，Wuhan 430074，China

Received:1900-01-01 Revised:1900-01-01 Online:2008-01-01 Published:2008-01-01
Contact: FENG Kui-jing

摘要/Abstract

摘要： 研究了基于采样定理的白光干涉测量算法——Square-envelop function Estimation by Sampling Theory （SEST）算法，该算法采样间隔是传统算法的数倍，最大可达1.425 ?滋m，大大提高了测量速度。在该算法基础上，提出应用循环缓冲器来定位相干区间，减少了存储的采样值及计算量，提高了数据处理速度。仿真结果表明，该算法是快速、有效的。

关键词: 光学测量, SEST算法, 白光干涉, 表面形貌

Abstract: An white-light interferometric algorithm，Square-envelop function Estimation by Sampling Theory（SEST） algorithm，based on sampling theory is introduced.The algorithm extends the sampling interval to 1.425 ?滋m，which is several times wider than those used in conventional algorithm.On the basis of the algorithm，a circular buffer is proposed to locate the interference region in order to reduce the sampling data and the computational cost then increase the data processing speed.Simulation results show that the algorithm is fast and effective.

Key words: optical measurement, SEST algorithm, white-light interference, surface profile

冯奎景^1,2,廖广兰^1,2,史铁林^1,2,王海珊^1,2. 基于采样定理的白光干涉SEST算法研究[J]. 计算机工程与应用, 2008, 44(1): 79-81.

FENG Kui-jing^1,2,LIAO Guang-lan^1,2,SHI Tie-lin^1,2,WANG Hai-shan^1,2. White-light interferometric SEST algorithm based on sampling theory[J]. Computer Engineering and Applications, 2008, 44(1): 79-81.