关键词: 显微机器视觉, MATLAB, 微纳米级构件, 图像处理与分析, 精密检测

Abstract: With the development of micro nano technology, a lot of precise microminiature electromechanical products have been widely used. Objecting to technique requirement of detection of micro nano component in the precise microminiature electromechanical products, a micro vision measurement system of high resolution CCD camera combined with universal stereo microscope is developed. It uses MATLAB software to study and deal with the collected images of micro nano component such as image preprocessing, threshold segmentation and mathematical morphology, edge detection and extraction, analysis and research. And it measures the tooth root diameter of the small gear, the measurement results are analyzed. The results show that the measurement error of the measurement system is small and the measuring accuracy of the measurement system is high, and it meets the requirements of precision measurement of micro nano structure.

Key words: micro machine vision, MATLAB, micro nano component, image processing and analysis, precision detection