不对称光阑对相干衍射成像缺陷检测效果的影响
盛昌杰1,2,韩 雷1,2
Impacts of asymmetric aperture on coherent diffractive imaging reconstruction performance in defect inspection
SHENG Changjie1,2, HAN Lei1,2
计算机工程与应用
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2017, (14): 178
-182
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DOI: 10.3778/j.issn.1002-8331.1602-0162