大口径光学组件面形检测系统关键算法研究

计算机工程与应用 ›› 2011, Vol. 47 ›› Issue (20): 163-166.

• 图形、图像、模式识别 • 上一篇下一篇

大口径光学组件面形检测系统关键算法研究

张隽楠1，范勇1，陈念年1，王俊波1，袁晓东2，程晓峰2，徐旭2，刘楠2

1.西南科技大学计算机科学与技术学院，四川绵阳 621010
2.中国工程物理研究院激光聚变研究中心，四川绵阳 621900

收稿日期:1900-01-01 修回日期:1900-01-01 出版日期:2011-07-11 发布日期:2011-07-11

Study on key algorithm in large optical components topography measurement system

ZHANG Junnan1，FAN Yong1，CHEN Niannian1，WANG Junbo1，YUAN Xiaodong2，CHENG Xiaofeng2，XU Xu2，LIU Nan2

1.Department of Computer Science and Technology，SWUST，Mianyang，Sichuan 621010，China
2.Research Center of Laser Fusion，CAEP，Mianyang，Sichuan 621900，China

Received:1900-01-01 Revised:1900-01-01 Online:2011-07-11 Published:2011-07-11

摘要/Abstract

摘要： 大口径光学组件面形检测系统中，激光光斑的分割、质心提取和背表面光斑的自动剔除算法关系到系统的检测精度。针对系统中多路光斑光强差异比较大的现象，提出了两次分割法，有效定位各光斑区域;通过比较不同质心提取算法的稳定性，选取灰度重心法提取激光光斑质心;采取基于特征的分类技术识别元件前表面反射光斑。实验结果表明，算法能精确稳定地提取光斑质心和有效识别前表面光斑，该方法已商用于光学组件面形检测系统。

关键词: 元件面形, 激光光斑, 两次分割法, 质心提取, 前表面光斑识别

Abstract: In the large optical components topography measurement system，the accuracy of measurement is greatly related to laser spot segmentation，centroid extraction and back surface spot removal.As the great difference in multi-spots’ light intensity，a twice-segmentation method is proposed to locate the region of the laser spots efficiently.Compared the stability of the algorithms for laser spot’s extraction，a gray-gravity method is chosen.A feature based classification method is proposed to discriminate the spots which are reflected by front surface of optical component.Experimental results demonstrate that these algorithms can extract laser spots accurately，stably and classify laser spots efficiently.Also，they are used in optical components topography measurement system successfully.

Key words: optical components topography measurement, laser spot, twice-segmentation, centroid extraction, discrimination of front reflected laser spot

张隽楠1，范勇1，陈念年1，王俊波1，袁晓东2，程晓峰2，徐旭2，刘楠2. 大口径光学组件面形检测系统关键算法研究[J]. 计算机工程与应用, 2011, 47(20): 163-166.

ZHANG Junnan1，FAN Yong1，CHEN Niannian1，WANG Junbo1，YUAN Xiaodong2，CHENG Xiaofeng2，XU Xu2，LIU Nan2. Study on key algorithm in large optical components topography measurement system[J]. Computer Engineering and Applications, 2011, 47(20): 163-166.

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大口径光学组件面形检测系统关键算法研究

Study on key algorithm in large optical components topography measurement system

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