Abstract: In near-field optical storage, dynamic flying height measuring technique is a key of the theory and its application. In flying height measuring method utilizing light intensity interference principle, the position control of micro flying head has effect on measuring error. This paper presents a location system based on visual feedback, focus on its configuration. The precision of mechanical control component and imaging processing algorithm was detailed. Analysis and experiment prove that this system has a location precision of 11μm, which causes flying height measuring error less than 1nm. These parameters enable high-resolution dynamic measurement of spacing between the flying head and disk.

摘要： 近场光存储方案中，头盘间距动态测控技术是将近场光存储理论和技术实用化的一项关键技术。基于强度干涉原理的飞高检测方案中，微型飞行头位姿控制是影响测量误差的一项关键因素。提出一种基于视觉反馈的定位控制系统，重点介绍其系统结构，分析机械控制元件和图像处理算法精度。试验表明，微型飞行头定位系统精度优于11μm，引起飞高检测误差在1nm范围内，满足高精度头盘间距动态测试要求。