Computer Engineering and Applications ›› 2008, Vol. 44 ›› Issue (36): 234-236.DOI: 10.3778/j.issn.1002-8331.2008.36.068

• 工程与应用 • Previous Articles     Next Articles

Research on semiconductor photolithography scheduling problem

MA Hui-min1,2,XU Sheng-liang1,YE Chun-ming2   

  1. 1.Business School,Shanghai Dianji University,Shanghai 200245,China
    2.Business School,University of Shanghai for Science & Technology,Shanghai 200093,China
  • Received:2008-08-28 Revised:2008-10-27 Online:2008-12-21 Published:2008-12-21
  • Contact: MA Hui-min

半导体黄光区调度问题研究

马慧民1,2,许圣良1,叶春明2   

  1. 1.上海电机学院 经济管理学院,上海 200245
    2.上海理工大学 管理学院,上海 200093
  • 通讯作者: 马慧民

Abstract: The problem of semiconductor photo area scheduling was studied.The model of semiconductor photo area scheduling was put forward and the method based on binary Particle Swarm Optimization(PSO) algorithm was proposed to solve this problem.The detailed realization of the method was illustrated.The example was computed.By comparison of the result,it can be found that the PSO is available and effective to solve the semiconductor photo area scheduling problem.

Key words: semiconductor photo area, Particle Swarm Optimization(PSO), scheduling

摘要: 对半导体黄光区调度问题进行了研究,建立了半导体黄光区调度的数学模型,分别提出了用于求解该问题的启发式方法和粒子群算法方案,阐明了两种算法方案的具体实现过程。通过对仿真实例进行计算和结果比较,表明了粒子群算法优于启发式方法,取得了不错的优化效果。

关键词: 半导体黄光区, 粒子群算法, 调度